수소의 영향에 따른 FBAR용 ZnO 박막의 구조적, 전기적 특성Effect of Hydrogen on the Structural and Electrical Properties of ZnO Thin Films for FBAR
- Publisher
- 한국재료학회
- Issue Date
- 2002-01-01
- Language
- KOR
- Citation
한국재료학회 2002년도 추계 학술대회
- Appears in Collection
- MS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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