수소의 영향에 따른 FBAR용 ZnO 박막의 구조적, 전기적 특성Effect of Hydrogen on the Structural and Electrical Properties of ZnO Thin Films for FBAR

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dc.contributor.author노광수-
dc.date.accessioned2013-03-16T03:38:14Z-
dc.date.available2013-03-16T03:38:14Z-
dc.date.created2012-02-06-
dc.date.issued2002-01-01-
dc.identifier.citation한국재료학회 2002년도 추계 학술대회, v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/127084-
dc.languageKOR-
dc.publisher한국재료학회-
dc.title수소의 영향에 따른 FBAR용 ZnO 박막의 구조적, 전기적 특성-
dc.title.alternativeEffect of Hydrogen on the Structural and Electrical Properties of ZnO Thin Films for FBAR-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname한국재료학회 2002년도 추계 학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor노광수-
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MS-Conference Papers(학술회의논문)
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