Graded Etching of Thermal Oxide with Various Angles using Silicafilm
- Issue Date
- 1980-03
- Language
- English
- Article Type
- Article
- Citation
IEEE ELECTRON DEVICE LETTERS, v.1, no.3, pp.30 - 31
- ISSN
- 0741-3106
- Appears in Collection
- EE-Journal Papers(저널논문)
- Files in This Item
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