Chemically amplified resists based on norbornene polymer with non- outgassing acid labile protecting group
- Publisher
- 한국고분자학회
- Issue Date
- 2000-10
- Language
- ENG
- Citation
한국고분자학회 2000년도 추계 학술대회 , v.25, no.2, pp.300 - 300
- Appears in Collection
- CH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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