Chemically amplified resists based on norbornene polymer with non- outgassing acid labile protecting group
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Jae Jun | - |
| dc.contributor.author | Lee, Kwan-Ku | - |
| dc.contributor.author | Kim, Jin-Baek | - |
| dc.date.accessioned | 2013-03-16T01:32:17Z | - |
| dc.date.available | 2013-03-16T01:32:17Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-10 | - |
| dc.identifier.citation | 한국고분자학회 2000년도 추계 학술대회 , v.25, no.2, pp.300 - 300 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/126053 | - |
| dc.language | ENG | - |
| dc.publisher | 한국고분자학회 | - |
| dc.title | Chemically amplified resists based on norbornene polymer with non- outgassing acid labile protecting group | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 25 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 300 | - |
| dc.citation.endingpage | 300 | - |
| dc.citation.publicationname | 한국고분자학회 2000년도 추계 학술대회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Kim, Jin-Baek | - |
| dc.contributor.nonIdAuthor | Lee, Jae Jun | - |
| dc.contributor.nonIdAuthor | Lee, Kwan-Ku | - |
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