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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

마이크로 게이지법을 이용한 poly-Si 박막의 열팽창 계수 측정

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Issue Date
1997
Language
KOR
Citation

'97 정보통신의 날 기념 정책전략포럼 및 학술발표회, pp.523 - 536

URI
http://hdl.handle.net/10203/123401
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MS-Conference Papers(학술회의논문)
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