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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Cycle-CVD법으로 증착된 TiN 박막의 ALD 증착기구와 특성에 관한 연구

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Issue Date
1998
Language
KOR
Citation

제5회 한국반도체학술대회 논문집, pp.329 - 330

URI
http://hdl.handle.net/10203/121476
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MS-Conference Papers(학술회의논문)
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