RF-PECVD법과 ECR-PECVD 법에 의해 증착된 TiN박막의 물성비교 연구

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Issue Date
1995-01-01
Language
KOR
Citation

한국재료학회 1995 추계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/119983
Appears in Collection
MS-Conference Papers(학술회의논문)
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