DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이원종 | - |
dc.contributor.author | 김종석 | - |
dc.contributor.author | 전병혁 | - |
dc.contributor.author | 이응직 | - |
dc.date.accessioned | 2013-03-15T13:50:43Z | - |
dc.date.available | 2013-03-15T13:50:43Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1995-01-01 | - |
dc.identifier.citation | 한국재료학회 1995 추계학술연구발표회, v., no., pp.0 - 0 | - |
dc.identifier.uri | http://hdl.handle.net/10203/119983 | - |
dc.language | KOR | - |
dc.title | RF-PECVD법과 ECR-PECVD 법에 의해 증착된 TiN박막의 물성비교 연구 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 0 | - |
dc.citation.endingpage | 0 | - |
dc.citation.publicationname | 한국재료학회 1995 추계학술연구발표회 | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | 이원종 | - |
dc.contributor.nonIdAuthor | 김종석 | - |
dc.contributor.nonIdAuthor | 전병혁 | - |
dc.contributor.nonIdAuthor | 이응직 | - |
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