Dry Etching Characteristics of Pt electrode in Ferroelectric Capacitor강유전체 커패시터에 대한 백금전극의 건식식각 특성

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Issue Date
1998-01-01
Language
ENG
Citation

The 5th Korean Conference on Semiconductors

URI
http://hdl.handle.net/10203/119882
Appears in Collection
CBE-Conference Papers(학술회의논문)
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