Dry Etching Characteristics of Pt electrode in Ferroelectric Capacitor강유전체 커패시터에 대한 백금전극의 건식식각 특성
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, JH | - |
| dc.contributor.author | Woo, Seong-Ihl | - |
| dc.date.accessioned | 2013-03-15T13:31:34Z | - |
| dc.date.available | 2013-03-15T13:31:34Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-01-01 | - |
| dc.identifier.citation | The 5th Korean Conference on Semiconductors, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/119882 | - |
| dc.language | ENG | - |
| dc.title | Dry Etching Characteristics of Pt electrode in Ferroelectric Capacitor | - |
| dc.title.alternative | 강유전체 커패시터에 대한 백금전극의 건식식각 특성 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | The 5th Korean Conference on Semiconductors | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Woo, Seong-Ihl | - |
| dc.contributor.nonIdAuthor | Kim, JH | - |
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