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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Dielectrric characteristics of ECR-PECVD TA2O5 thin films on various substrates

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Lee, Won-Jongresearcher / Chun, Soung Soonresearcher / Kim, Il
Publisher
ICEM
Issue Date
1994-12
Language
English
Citation

Proceedings of the IUMRS (International Union of Materials Research Society) 1994 International conference on Electronic Materials (ICEM'94), pp.321 - 326

URI
http://hdl.handle.net/10203/119246
Appears in Collection
MS-Conference Papers(학술회의논문)RIMS Conference Papers
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