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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Dielectrric characteristics of ECR-PECVD TA2O5 thin films on various substrates

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dc.contributor.authorLee, Won-Jongko
dc.contributor.authorChun, Soung Soonko
dc.contributor.authorKim, Ilko
dc.date.accessioned2013-03-15T11:54:33Z-
dc.date.available2013-03-15T11:54:33Z-
dc.date.created2012-02-06-
dc.date.issued1994-12-
dc.identifier.citationProceedings of the IUMRS (International Union of Materials Research Society) 1994 International conference on Electronic Materials (ICEM'94), pp.321 - 326-
dc.identifier.urihttp://hdl.handle.net/10203/119246-
dc.languageEnglish-
dc.publisherICEM-
dc.titleDielectrric characteristics of ECR-PECVD TA2O5 thin films on various substrates-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage321-
dc.citation.endingpage326-
dc.citation.publicationnameProceedings of the IUMRS (International Union of Materials Research Society) 1994 International conference on Electronic Materials (ICEM'94)-
dc.identifier.conferencecountryCH-
dc.identifier.conferencelocationHsinchu-
dc.contributor.localauthorLee, Won-Jong-
dc.contributor.localauthorChun, Soung Soon-
dc.contributor.nonIdAuthorKim, Il-
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MS-Conference Papers(학술회의논문)RIMS Conference Papers
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