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College of Engineering(공과대학)Dept. of Chemical and Biomolecular Engineering(생명화학공학과)CBE-Conference Papers(학술회의논문)

Modeling and simulation for wafer temperature uniformity in RTP system

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Park, Hyungjin / Lee, Jeongseok / Park, Sunwonresearcher
Issue Date
1998-10
Language
ENG
Citation

ChungNam-Kyushu meeting, Fall

URI
http://hdl.handle.net/10203/116060
Appears in Collection
CBE-Conference Papers(학술회의논문)
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