SiH4 첨가에 의한 저유전율 SiOF 박막의 유전특성 변화

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Issue Date
1998-01-01
Language
KOR
Citation

한국재료학회 춘계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/115726
Appears in Collection
MS-Conference Papers(학술회의논문)
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