SiH4 첨가에 의한 저유전율 SiOF 박막의 유전특성 변화
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이원종 | - |
| dc.contributor.author | 변경문 | - |
| dc.date.accessioned | 2013-03-15T02:24:41Z | - |
| dc.date.available | 2013-03-15T02:24:41Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1998-01-01 | - |
| dc.identifier.citation | 한국재료학회 춘계학술연구발표회, v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/115726 | - |
| dc.language | KOR | - |
| dc.title | SiH4 첨가에 의한 저유전율 SiOF 박막의 유전특성 변화 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | 한국재료학회 춘계학술연구발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.nonIdAuthor | 변경문 | - |
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