ECR PECVD 법으로 제조한 고집적 메모리소자 charge storage capacitor용 PLZT박막의 전기적 특성

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Issue Date
1996-01-01
Language
KOR
Citation

한국재료학회 1996 추계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/115461
Appears in Collection
MS-Conference Papers(학술회의논문)
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