Effects if Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon

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Publisher
International Conference on Thin Films & International Conference on Metallurgical Coatings
Issue Date
1990-04
Language
English
Citation

8th Int. Conf. on Thin Films, Metallurgical Coatings

URI
http://hdl.handle.net/10203/109957
Appears in Collection
RIMS Conference PapersRIMS Conference Papers
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