Effects if Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lim, Ho Bin | ko |
| dc.date.accessioned | 2013-03-14T14:59:53Z | - |
| dc.date.available | 2013-03-14T14:59:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1990-04 | - |
| dc.identifier.citation | 8th Int. Conf. on Thin Films, Metallurgical Coatings | - |
| dc.identifier.uri | http://hdl.handle.net/10203/109957 | - |
| dc.language | English | - |
| dc.publisher | International Conference on Thin Films & International Conference on Metallurgical Coatings | - |
| dc.title | Effects if Lattice Damages on Impurity Depth Profiles in BF2+ Ion Implanted Silicon | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 8th Int. Conf. on Thin Films, Metallurgical Coatings | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | San Diego, CA | - |
| dc.contributor.localauthor | Lim, Ho Bin | - |
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