Very light nitridation of thin gate oxide in low pressure N2OVery light nitridation of thin gate oxide in low pressure N2O

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 488
  • Download : 0
Issue Date
1994-05-08
Language
ENG
Citation

3rd Symp. on Silicon Nitride and Silicon Dioxide Thin Insulation Films, pp.458 - 458

URI
http://hdl.handle.net/10203/108500
Appears in Collection
EE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0