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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Very light nitridation of thin gate oxide in low pressure N2OVery light nitridation of thin gate oxide in low pressure N2O

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Cho, Byung Jinresearcher / Joo, MS / Lee, SH / Kim, JC / Choi, SH
Issue Date
1994-05-08
Language
ENG
Citation

3rd Symp. on Silicon Nitride and Silicon Dioxide Thin Insulation Films, pp.458 - 458

URI
http://hdl.handle.net/10203/108500
Appears in Collection
EE-Conference Papers(학술회의논문)
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