산소와 질소분위기에서 열처리된 ECR- PECVD 탄탈륨 산화막의 전기적 성질 연구

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Publisher
한국재료학회
Issue Date
1994-05
Language
Korean
Citation

한국재료학회 춘계학술연구발표회, pp.0 - 0

URI
http://hdl.handle.net/10203/106103
Appears in Collection
RIMS Conference PapersMS-Conference Papers(학술회의논문)RIMS Conference Papers
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