Synthesis of Green Emitting and Transparent Zn2SiO4:Mn2+ Thin Film Phosphors on 2D Photonic Crystal Patterned Quartz Substrates

Abstract

Zn2SiO4:Mn2+ thin film phosphors (TFPs) have been synthesized by RF magnetron sputtering, using a single multicomponent stoichiometric target. And 2D photonic crystal patterns were introduced on a quartz substrate to enhance the light extraction efficiency. In order to introduce 2D photonic crystal patterns on a quartz substrate, nanosphere lithography was used. Polystyrene spheres, with diameter of 330 nm, were transferred on the quartz substrate and subsequently were served as an etch mask. Quartz substrates were patterned by CF4 gas-based reactive ion etching. Zn2SiO4:Mn2+ were deposited on that 2D photonic crystal patterned quartz substrate and the effect of height of photonic crystal layers were investigated. The light extraction efficiency of Zn2SiO4:Mn2+ thin film phosphors deposited on the photonic crystal patterned quartz substrate was enhanced three times to compared with that of flat Zn2SiO4:Mn2+ thin film phosphors due to the Bragg diffraction and leaky mode caused by PCLs. Transmittance of Zn2SiO4:Mn2+ TFPs deposited on the photonic crystal patterned substrate was high enough, above 70% in the visible light region with respect to that of quartz substrate.