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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Highly ordered and well aligned TiN nanotube arrays fabricated via template-assisted atomic layer deposition

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dc.contributor.authorYoon, Jae-Sungko
dc.contributor.authorKim, Sang-Joonko
dc.contributor.authorNo, Kwang-Sooko
dc.date.accessioned2013-03-12T14:59:35Z-
dc.date.available2013-03-12T14:59:35Z-
dc.date.created2012-12-13-
dc.date.created2012-12-13-
dc.date.issued2012-11-
dc.identifier.citationMATERIALS LETTERS, v.87, pp.124 - 126-
dc.identifier.issn0167-577X-
dc.identifier.urihttp://hdl.handle.net/10203/102650-
dc.description.abstractHighly ordered and well aligned TiN nanotube arrays were fabricated using a template-assisted method with an anodic aluminum oxide template and the ALD technique. The TiN nanotube arrays were well aligned at a low aspect ratio. However, for an aspect ratio of 14, the TiN nanotubes were clustered and bundled together due to the lateral capillary forces between the nanotubes during the air drying process where water was removed. Furthermore, good ductility of the TiN nanotube arrays was observed, which has not been reported previously. (C) 2012 Elsevier B.V. All rights reserved.-
dc.languageEnglish-
dc.publisherELSEVIER SCIENCE BV-
dc.subjectTITANIUM NITRIDE-
dc.subjectTHIN-FILMS-
dc.subjectPRECURSOR-
dc.titleHighly ordered and well aligned TiN nanotube arrays fabricated via template-assisted atomic layer deposition-
dc.typeArticle-
dc.identifier.wosid000311004500034-
dc.identifier.scopusid2-s2.0-84865838052-
dc.type.rimsART-
dc.citation.volume87-
dc.citation.beginningpage124-
dc.citation.endingpage126-
dc.citation.publicationnameMATERIALS LETTERS-
dc.identifier.doi10.1016/j.matlet.2012.07.081-
dc.contributor.localauthorNo, Kwang-Soo-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorTiN-
dc.subject.keywordAuthorAnodic aluminum oxide-
dc.subject.keywordAuthorALD-
dc.subject.keywordAuthorNanotube arrays-
dc.subject.keywordPlusTITANIUM NITRIDE-
dc.subject.keywordPlusTHIN-FILMS-
dc.subject.keywordPlusPRECURSOR-
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