Reversible creation of nanostructures between identical or different species of materials

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In this study, accurate nanostructures with various aspect ratios are created on several types of material. This work is highly applicable to the energy, optical, and nano-bio fields, for example. A silicon (Si) nano-mold is preserved using the method described, and target nanostructures are replicated reversibly and unlimitedly to or from various hard and soft materials. It is also verified that various materials can be applied to the substrates. The results confirm that the target nanostructures are successfully created in precise straight line structures and circle structures with various aspect ratios, including extremely high aspect ratios of 1:18. It is suggested that the optimal replicating and demolding process of nanostructures with high aspect ratios, which are the most problematic, could be controlled by means of the surface energy between the functional materials. Relevant numerical and analytical studies are also performed. It is possible to expand the applicability of the nanostructured mold by adopting various backing materials, including rounded substrates. The scope of the applications is extended further by transferring the nanostructures between different species of materials including metallic materials as well as identical species.
Publisher
SPRINGER
Issue Date
2012-07
Language
English
Article Type
Article
Keywords

SOFT LITHOGRAPHY; ASPECT-RATIO; PATTERN-TRANSFER; FABRICATION; FIDELITY; DENSITY; ARRAYS; MICRO

Citation

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, v.108, no.1, pp.41 - 52

ISSN
0947-8396
DOI
10.1007/s00339-012-6999-y
URI
http://hdl.handle.net/10203/102041
Appears in Collection
MS-Journal Papers(저널논문)
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