Directed Self-Assembly with Sub-100 Degrees Celsius Processing Temperature, Sub-10 Nanometer Resolution, and Sub-1 Minute Assembly Time

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Publisher
WILEY-V C H VERLAG GMBH
Issue Date
2012-12
Language
English
Article Type
Article
Keywords

ORDER-DISORDER TRANSITION; BLOCK-COPOLYMER PATTERNS; DIBLOCK COPOLYMER; THIN-FILMS; MICRODOMAIN ORIENTATION; LITHOGRAPHY; ARRAYS; NANOLITHOGRAPHY; FABRICATION; NANOSTRUCTURES

Citation

SMALL, v.8, no.24, pp.3762 - 3768

ISSN
1613-6810
DOI
10.1002/smll.201201407
URI
http://hdl.handle.net/10203/101894
Appears in Collection
MS-Journal Papers(저널논문)
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