Hybrid Si-LiNbO(3) microring electro-optically tunable resonators for active photonic devices

Abstract

Hybrid Si-LiNbO3 electro-optic tunable ring resonators have been proposed and demonstrated as a path to achieving ultracompact and high-speed electro-optic devices. Free standing single crystal LiNbO3 microplatelets (similar to mm long and similar to 1 mu m thick) were obtained from a z-cut LiNbO3 substrate by ion implantation and thermal treatment. The platelets were transferred and thermally bonded on top of Si resonators that were fabricated in a Si-on-insulator platform by a 0.18 mu m standard complementary metal-oxide-semiconductor process. For the hybrid microring resonator, a free spectral range of 16:5nm, a finesse F of similar to 1.67 x 10(2), a Q-factor of similar to 1.68 x 10(4), and an effective r coefficient of similar to 1.7pm/V were achieved for the TE mode. These values are in good agreement with the calculated results. (C) 2011 Optical Society of America