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Effect of UV-O-2, NF3/H-2 surface preparation on the crystalline defects in silicon homoepitaxy (Part I. A study on photochemical surface preparation in series) Sun, MC; Kim, DoHyun; Kwon, SK, JOURNAL OF CRYSTAL GROWTH, v.237, no.2, pp.1399 - 1403, 2002-04 |
An Experimental Study of Fatigue Strength for Adhesively Bonded Tubular Single Lap Joints Im, Y.T.; Lee, D.G.; Kim, K.S., Journal of Adhesion, Vol.35, No.1, pp.39-53, 1991-04 |
Low-pressure UV ozone and $UV/NF_3-H_2$ cleaning of the silicon surface coated with a commercial photoresist, AZ1512 = 상용감광제 AZ1512가 도포된 실리콘 표면의 저압 자외광 오존 및 자외광/삼불화질소-수소 표면처리link Sun, Min-Chul; 선민철; et al, 한국과학기술원, 2001 |
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