학위논문(석사) - 한국과학기술원 : 화학공학과, 2001.8, [ xii, 66 ]
commercial photoresist; UV/NF3-H2; UV ozone; surface preparation; cleaning; 세정; 상용감광제; 자외광/삼불화질소-수소; 자외광 오존; 표면처리
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