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Monolithically 3-D Integrated Nanoelectromechanical (NEM) Configuration Memory for CMOS-NEM Hybrid Demultiplexer

Kim, Tae-Soo; Lee, Yong-Bok; Kim, Sung-Ho; Lee, So-Young; Lee, Seung-Jun; Yoon, Jun-Bo, IEEE ELECTRON DEVICE LETTERS, v.44, no.12, pp.2055 - 2058, 2023-12

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