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Showing results 1 to 5 of 5

1
Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods

Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07

2
Low-pressure UV ozone and $UV/NF_3-H_2$ cleaning of the silicon surface coated with a commercial photoresist, AZ1512 = 상용감광제 AZ1512가 도포된 실리콘 표면의 저압 자외광 오존 및 자외광/삼불화질소-수소 표면처리link

Sun, Min-Chul; 선민철; et al, 한국과학기술원, 2001

3
Round pinholes in indium-tin-oxide thin films on the glass substrates: a Taguchi method analysis and theoretical approach to their origins

Lee, HC; Park, OOk, VACUUM, v.72, no.4, pp.411 - 418, 2004-01

4
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations

Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04

5
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01

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