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High-resolution capacitive subnanometric motion detectors using branched finger electrodes with high-amplitude sense voltage = 고감지전압 및 가지전극을 이용한 고정도 정전용량형 나노운동 감지체 및 응용link Han, Ki-Ho; 한기호; et al, 한국과학기술원, 2002 |
Self-balanced navigation-grade capacitive microaccelerometers using branched finger electrodes and their performance for varying sense voltage and pressure Han, KH; Cho, Young-Ho, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.12, pp.11 - 20, 2003-02 |
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