학위논문(박사) - 한국과학기술원 : 기계공학전공, 2002.2, [ xiii, 117 p. ]
branched finger electrodes; high-amplitude sense voltage; capacitive microaccelerometer; capacitive subnanometric motion detectors; self force-balancing; 자율균형력; 가지전극; 고감지전압; 정전용량형 미소가속도계; 정전용량형 나노운동 감지체
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.