Showing results 2 to 5 of 5
Low-pressure UV ozone and $UV/NF_3-H_2$ cleaning of the silicon surface coated with a commercial photoresist, AZ1512 = 상용감광제 AZ1512가 도포된 실리콘 표면의 저압 자외광 오존 및 자외광/삼불화질소-수소 표면처리link Sun, Min-Chul; 선민철; et al, 한국과학기술원, 2001 |
Round pinholes in indium-tin-oxide thin films on the glass substrates: a Taguchi method analysis and theoretical approach to their origins Lee, HC; Park, OOk, VACUUM, v.72, no.4, pp.411 - 418, 2004-01 |
Scheduling Single-Armed Cluster Tools With Chamber Cleaning Operations Yu, Tae Sun; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.15, no.2, pp.705 - 716, 2018-04 |
Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations Yu, Tae-Sun; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.58, no.2, pp.434 - 447, 2020-01 |
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