New structures and techniques for easy axial loading test of static and fatigue properties of MEMS materials

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems (MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an axial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.
Publisher
TRANS TECH PUBLICATIONS LTD
Issue Date
2005
Language
ENG
Keywords

TENSILE-STRENGTH; YOUNGS-MODULUS; THIN-FILMS; POLYSILICON

Citation

KEY ENGINEERING MATERIALS, v.297-300, pp.545 - 550

ISSN
1013-9826
URI
http://hdl.handle.net/10203/87439
Appears in Collection
ME-Journal Papers(저널논문)
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