인덕턴스형 미소 변위 측정 시스템과 응답 특성의 분석

Abstract

This paper presents a mew design of an inductive position sensing system with high sensitivity. The designed system consists of the driving coils, position-detecting coils, and closed loop formed magnetic blocks. To obtain high sensitivity we design a symmetric and closed loop type measuring system with small air-gaps. The elements that affect the system characteristics are turn ratio, excitation frequency, air-gap size, capacitance effect, and load resistance. By experimental investigation, the influences of these elements are examined and the system parameters are selected. The sensitivity of the newly designed system is greater than 2800mV/(V mm) and the linearity error is below${\pm}0.01%; in; the; range; of; {\pm}200{\mu}m$.