헬리칼 공명 플라즈마에서 축방향의 외부자장이 기판상의 플라즈마 밀도에 미치는 영향 Effects of axial external magnetic fields on plasma density on substrate in helical resonator plasma source

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Publisher
한국진공학회
Issue Date
1999-05
Language
Korean
Citation

한국진공학회지, v.8, no.2, pp.172 - 179

URI
http://hdl.handle.net/10203/78251
Appears in Collection
EE-Journal Papers(저널논문)
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