헬리칼 공명 플라즈마에서 축방향의 외부자장이 기판상의 플라즈마 밀도에 미치는 영향Effects of axial external magnetic fields on plasma density on substrate in helical resonator plasma source

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dc.contributor.author김태현ko
dc.contributor.author태흥식ko
dc.contributor.author이용현ko
dc.contributor.author이호준ko
dc.contributor.author이정해ko
dc.contributor.author최경철ko
dc.date.accessioned2013-03-03T09:45:48Z-
dc.date.available2013-03-03T09:45:48Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1999-05-
dc.identifier.citation한국진공학회지, v.8, no.2, pp.172 - 179-
dc.identifier.urihttp://hdl.handle.net/10203/78251-
dc.languageKorean-
dc.publisher한국진공학회-
dc.title헬리칼 공명 플라즈마에서 축방향의 외부자장이 기판상의 플라즈마 밀도에 미치는 영향-
dc.title.alternativeEffects of axial external magnetic fields on plasma density on substrate in helical resonator plasma source-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume8-
dc.citation.issue2-
dc.citation.beginningpage172-
dc.citation.endingpage179-
dc.citation.publicationname한국진공학회지-
dc.contributor.localauthor최경철-
dc.contributor.nonIdAuthor김태현-
dc.contributor.nonIdAuthor태흥식-
dc.contributor.nonIdAuthor이용현-
dc.contributor.nonIdAuthor이호준-
dc.contributor.nonIdAuthor이정해-
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