A control method to reduce the standard deviation of flow time in wafer fabrication

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dc.contributor.authorYoon, HJko
dc.contributor.authorLee, Doo Yongko
dc.date.accessioned2013-03-02T17:20:07Z-
dc.date.available2013-03-02T17:20:07Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2000-08-
dc.identifier.citationIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.13, no.3, pp.389 - 392-
dc.identifier.issn0894-6507-
dc.identifier.urihttp://hdl.handle.net/10203/74694-
dc.description.abstractThis paper proposes a control method for reducing flow time variability in a wafer fabrication facility with multiple wafer types. We employ stochastic petri nets to model and analyze the machine module, and define operation due dates using a novel utilization index metric. An operation due date (OPNDD) rule for lot dispatch is proposed and evaluated against other tot dispatch policies.-
dc.languageEnglish-
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC-
dc.subjectSTOCHASTIC PETRI NETS-
dc.subjectPERFORMANCE EVALUATION-
dc.subjectPOLICIES-
dc.titleA control method to reduce the standard deviation of flow time in wafer fabrication-
dc.typeArticle-
dc.identifier.wosid000088719100019-
dc.identifier.scopusid2-s2.0-0034250152-
dc.type.rimsART-
dc.citation.volume13-
dc.citation.issue3-
dc.citation.beginningpage389-
dc.citation.endingpage392-
dc.citation.publicationnameIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING-
dc.contributor.localauthorLee, Doo Yong-
dc.contributor.nonIdAuthorYoon, HJ-
dc.type.journalArticleLetter-
dc.subject.keywordAuthorflow time (cycle time)-
dc.subject.keywordAuthorscheduling-
dc.subject.keywordAuthorstochastic petri nets (SPN)-
dc.subject.keywordAuthorwafer fabrication-
dc.subject.keywordPlusSTOCHASTIC PETRI NETS-
dc.subject.keywordPlusPERFORMANCE EVALUATION-
dc.subject.keywordPlusPOLICIES-
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