A control method to reduce the standard deviation of flow time in wafer fabrication
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yoon, HJ | ko |
| dc.contributor.author | Lee, Doo Yong | ko |
| dc.date.accessioned | 2013-03-02T17:20:07Z | - |
| dc.date.available | 2013-03-02T17:20:07Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-08 | - |
| dc.identifier.citation | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.13, no.3, pp.389 - 392 | - |
| dc.identifier.issn | 0894-6507 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/74694 | - |
| dc.description.abstract | This paper proposes a control method for reducing flow time variability in a wafer fabrication facility with multiple wafer types. We employ stochastic petri nets to model and analyze the machine module, and define operation due dates using a novel utilization index metric. An operation due date (OPNDD) rule for lot dispatch is proposed and evaluated against other tot dispatch policies. | - |
| dc.language | English | - |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
| dc.subject | STOCHASTIC PETRI NETS | - |
| dc.subject | PERFORMANCE EVALUATION | - |
| dc.subject | POLICIES | - |
| dc.title | A control method to reduce the standard deviation of flow time in wafer fabrication | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000088719100019 | - |
| dc.identifier.scopusid | 2-s2.0-0034250152 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 13 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 389 | - |
| dc.citation.endingpage | 392 | - |
| dc.citation.publicationname | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | - |
| dc.contributor.localauthor | Lee, Doo Yong | - |
| dc.contributor.nonIdAuthor | Yoon, HJ | - |
| dc.type.journalArticle | Letter | - |
| dc.subject.keywordAuthor | flow time (cycle time) | - |
| dc.subject.keywordAuthor | scheduling | - |
| dc.subject.keywordAuthor | stochastic petri nets (SPN) | - |
| dc.subject.keywordAuthor | wafer fabrication | - |
| dc.subject.keywordPlus | STOCHASTIC PETRI NETS | - |
| dc.subject.keywordPlus | PERFORMANCE EVALUATION | - |
| dc.subject.keywordPlus | POLICIES | - |
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