AES, RBS 및 XRD 분석을 이용한 Si(111)면에서의 다결정-CrSi2의 성장 Formation of Polycrystalline CrSi2 on Si (111) Substrate Studied by Auger Electron Spectroscopy, 2 MeV 4He+ Ion Backscattering Spectroscopy, and X-ray Diffraction

Publisher
한국물리학회
Issue Date
1994-12
Language
KOR
Citation

새물리, v.34, no.6, pp.726 - 731

ISSN
0374-4914
URI
http://hdl.handle.net/10203/64825
Appears in Collection
MS-Journal Papers(저널논문)
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