PREPARATION OF ALUMINUM NITRIDE THIN-FILMS USING SINGLE PRECURSOR OMCVD
- Publisher
- KOREAN CHEMICAL SOC
- Issue Date
- 1993-04
- Language
- English
- Article Type
- Note
- Keywords
CHEMICAL VAPOR-DEPOSITION; ORGANOMETALLIC PRECURSORS; SEMICONDUCTORS; GROWTH; ALN
- Citation
BULLETIN OF THE KOREAN CHEMICAL SOCIETY, v.14, no.2, pp.163 - 164
- ISSN
- 0253-2964
- Appears in Collection
- CH-Journal Papers(저널논문)
- Files in This Item
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