웨이퍼 가공기의 진동 해석 및 실험적 검증 Vibration Analysis of Wafer Cutting Machine and its Experimental Verification

The free vibrations of the outer-clamped spinning annular disk which simulates a wafer cutting machine are investigated. The effects of the initial tension, the centrifugal force and outer-fixture extension caused by spinning on the vibration characteristics of the disk are considered. The modal parameters of the disk are calculated by using Galerkins method as the rotating speed and initial tension are varied. Laboratory experiments are also performed with a rotating and stationary disk, and, it is found that experimental and simulation results are in good agreement.
Publisher
대한기계학회
Issue Date
1992-01
Language
KOR
Citation

대한기계학회논문집 A, v.16, no.1, pp.22 - 30

ISSN
1226-4873
URI
http://hdl.handle.net/10203/57332
Appears in Collection
ME-Journal Papers(저널논문)
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