공구강위에 플라즈마 화학증착, Cathodic arc ion plating 및 DC reactive magnetron sputtering한 TiN 박막의 물성에 관한 연구A study on the properties of Tin coatings by plasma assisted CVD, cathodic Arc ion plating and DC reactive magnetron sputtering on SKH9
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 60416/325007 / 000901484
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iv], 80 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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