공구강위에 플라즈마 화학증착, Cathodic arc ion plating 및 DC reactive magnetron sputtering한 TiN 박막의 물성에 관한 연구 = A study on the properties of Tin coatings by plasma assisted CVD, cathodic Arc ion plating and DC reactive magnetron sputtering on SKH9

Advisors
천성순researcherChun, Soung-Soonresearcher
Publisher
한국과학기술원
Issue Date
1992
Identifier
60416/325007 / 000901484
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iv], 80 p. ]

URI
http://hdl.handle.net/10203/51392
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60416&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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