공구강위에 플라즈마 화학증착, Cathodic arc ion plating 및 DC reactive magnetron sputtering한 TiN 박막의 물성에 관한 연구A study on the properties of Tin coatings by plasma assisted CVD, cathodic Arc ion plating and DC reactive magnetron sputtering on SKH9
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 정병진 | - |
| dc.contributor.author | Jeong, Byeong-Jin | - |
| dc.date.accessioned | 2011-12-15T01:42:55Z | - |
| dc.date.available | 2011-12-15T01:42:55Z | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60416&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51392 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1992.2, [ [iv], 80 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 공구강위에 플라즈마 화학증착, Cathodic arc ion plating 및 DC reactive magnetron sputtering한 TiN 박막의 물성에 관한 연구 | - |
| dc.title.alternative | A study on the properties of Tin coatings by plasma assisted CVD, cathodic Arc ion plating and DC reactive magnetron sputtering on SKH9 | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 60416/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000901484 | - |
| dc.contributor.localauthor | 천성순 | - |
| dc.contributor.localauthor | Chun, Soung-Soon | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.