평면형 금속/절연막/다결정실리콘/절연막/금속 안티퓨즈 구조의 금속도선 형성에 관한 연구 = A study on the metal line formation in planar metal/dielectric/poly-Si/dielectric/metal antifuse structure

Advisors
안병태researcherAhn, Byung-Taeresearcher
Publisher
한국과학기술원
Issue Date
1995
Identifier
99501/325007 / 000933456
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 64 p. ]

URI
http://hdl.handle.net/10203/51277
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99501&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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