평면형 금속/절연막/다결정실리콘/절연막/금속 안티퓨즈 구조의 금속도선 형성에 관한 연구A study on the metal line formation in planar metal/dielectric/poly-Si/dielectric/metal antifuse structure
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 안병태 | - |
| dc.contributor.advisor | Ahn, Byung-Tae | - |
| dc.contributor.author | 정승훈 | - |
| dc.contributor.author | Chong, Sung-Hoon | - |
| dc.date.accessioned | 2011-12-15T01:41:01Z | - |
| dc.date.available | 2011-12-15T01:41:01Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99501&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/51277 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1995.2, [ iv, 64 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 평면형 금속/절연막/다결정실리콘/절연막/금속 안티퓨즈 구조의 금속도선 형성에 관한 연구 | - |
| dc.title.alternative | A study on the metal line formation in planar metal/dielectric/poly-Si/dielectric/metal antifuse structure | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99501/325007 | - |
| dc.description.department | 한국과학기술원 : 전자재료공학과, | - |
| dc.identifier.uid | 000933456 | - |
| dc.contributor.localauthor | 정승훈 | - |
| dc.contributor.localauthor | Chong, Sung-Hoon | - |
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- MS-Theses_Master(석사논문)
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