화학증착법에 의한 $ZrO_2$ 박막의 제조 및 반응변수에 따른 증착특성 = The fabrication of the $ZrO_2$ thin film by chemical vapor deposition and the effect of the reaction parameters on the deposition characteristics

Advisors
김호기researcherKim, Ho-Giresearcher
Publisher
한국과학기술원
Issue Date
1990
Identifier
67554/325007 / 000881512
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ iii, 57 p. ]

Keywords

Deposition rate; 증착 속도

URI
http://hdl.handle.net/10203/51203
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67554&flag=t
Appears in Collection
MS-Theses_Master(석사논문)
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