DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | 김호기 | - |
dc.contributor.advisor | Kim, Ho-Gi | - |
dc.contributor.author | 최준후 | - |
dc.contributor.author | Choi, Joon-Hoo | - |
dc.date.accessioned | 2011-12-15T01:39:51Z | - |
dc.date.available | 2011-12-15T01:39:51Z | - |
dc.date.issued | 1990 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67554&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/51203 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1990.2, [ iii, 57 p. ] | - |
dc.language | kor | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | Deposition rate | - |
dc.subject | 증착 속도 | - |
dc.title | 화학증착법에 의한 $ZrO_2$ 박막의 제조 및 반응변수에 따른 증착특성 | - |
dc.title.alternative | The fabrication of the $ZrO_2$ thin film by chemical vapor deposition and the effect of the reaction parameters on the deposition characteristics | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 67554/325007 | - |
dc.description.department | 한국과학기술원 : 재료공학과, | - |
dc.identifier.uid | 000881512 | - |
dc.contributor.localauthor | 김호기 | - |
dc.contributor.localauthor | Kim, Ho-Gi | - |
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