플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 절연박막의 특성에 관한 연구A study on the properties of the aluminum oxide dielectric films deposited by plasma enhanced chemical vapor deposition
- Advisors
- 천성순researcher; Chun, Soung-Soonresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 61567/325007 / 000855013
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.2, [ [iv], 139 p. ]
- Keywords
절연 박막
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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