플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 절연박막의 특성에 관한 연구 = A study on the properties of the aluminum oxide dielectric films deposited by plasma enhanced chemical vapor deposition

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Advisors
천성순researcherChun, Soung-Soonresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1990
Identifier
61567/325007 / 000855013
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.2, [ [iv], 139 p. ]

Keywords

절연 박막

URI
http://hdl.handle.net/10203/50332
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61567&flag=dissertation
Appears in Collection
MS-Theses_Ph.D.(박사논문)
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