플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 절연박막의 특성에 관한 연구A study on the properties of the aluminum oxide dielectric films deposited by plasma enhanced chemical vapor deposition
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 천성순 | - |
| dc.contributor.advisor | Chun, Soung-Soon | - |
| dc.contributor.author | 강창진 | - |
| dc.contributor.author | Kang, Chang-Jin | - |
| dc.date.accessioned | 2011-12-15T01:05:31Z | - |
| dc.date.available | 2011-12-15T01:05:31Z | - |
| dc.date.issued | 1990 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=61567&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50332 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 재료공학과, 1990.2, [ [iv], 139 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 절연 박막 | - |
| dc.title | 플라즈마 화학증착법에 의하여 증착된 Aluminum oxide 절연박막의 특성에 관한 연구 | - |
| dc.title.alternative | A study on the properties of the aluminum oxide dielectric films deposited by plasma enhanced chemical vapor deposition | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 61567/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000855013 | - |
| dc.contributor.localauthor | 강창진 | - |
| dc.contributor.localauthor | Kang, Chang-Jin | - |
- Appears in Collection
- MS-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.