전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcher
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 장충석 | - |
| dc.contributor.advisor | Chang, Choong-Seock | - |
| dc.contributor.author | 김용진 | - |
| dc.contributor.author | Kim, Yong-Jin | - |
| dc.date.accessioned | 2011-12-14T07:26:39Z | - |
| dc.date.available | 2011-12-14T07:26:39Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=101835&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47519 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1995.8, [ ix, 80 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 플라즈마 변수 평준화 | - |
| dc.subject | 광분석 | - |
| dc.subject | 활성원자 | - |
| dc.subject | 전자싸이클로트론 공명 플라즈마 | - |
| dc.subject | ECR | - |
| dc.subject | actinometry | - |
| dc.subject | Optical emission spectroscopy | - |
| dc.subject | Plasma parameter normalization | - |
| dc.subject | Radical species | - |
| dc.title | 전자 싸이클로트론 공명 플라즈마 식각장치내에서 $SF_6$ 방전시 생성된 F 활성원자의 분포특성 연구 | - |
| dc.title.alternative | Study on the characteristics of F radical atoms created from the $SF_6$ discharge in ECR plasma etcher | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 101835/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000925070 | - |
| dc.contributor.localauthor | 김용진 | - |
| dc.contributor.localauthor | Kim, Yong-Jin | - |
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